Gas Valve Manifold Boxes

  • Gas Valve Manifold Boxes

Gas valve manifold boxes (VMBs) are designed to take a single source gas and distribute to multiple tools and be able to service components within the VMB with vent and purge features to  safely change out or remove the gas stick without takings all you tools down. Valve manifold boxes serve as distribution box or may allow multiple compatible gases to enter and exit with the ability to vent and purge while other processes are still running. These boxes are designed to be as simple as gas isolation box or vent and purge stick assemblies with devices to monitor life safety events, such as high pressure, excess flow to trigger emergency shutoff valves all monitor with PLC based controllers.

Specialty gas manifolds are useful in many applications and industries including semiconductor, medical, and pharmaceutical applications. They are usually paired with a pressure regulator that reduces the pressure within the gas valve manifold to an appropriate operating range along with gauges, transducers, and mass flow meters / controllers to monitor.

SilPac offers standard manual gas boxes, as well as semi-automatic gas boxes with pneumatic ESO valves and life safety controllers. 4-stick vmbs and 8-stick vmbs configurations are available, as well as single  gas sticks and gas stick assemblies that allow for gas distribution through multiple outputs from a single-source supply without the need for a gas valve box enclosure when warranted.


Advantages of Pneumatic Valve Manifold Boxes

Gas valve manifold boxes are a secure and extremely affordable way of connecting single source gas to multiple distribution points or multiple compatible gases to single process tools.  They are affordable and useful for eliminating multiple boxes to each tool centralizing the gasses and saving valuable fab space.

VMBs provide numerous benefits for the user, including:

  • Safe and Dependable Gas Distribution: Safety is the most important thing when you’re working with dangerous gases. We designed our VMBs to offer safety and reliability that you and your employees can count on.
  • Cost-Effectiveness: Because they are designed to minimize downtime, our valve manifold boxes help reduce costs associated with work stoppages.
  • Versatility: Gas valve boxes can be configured for any application. Our engineers can help you achieve the set-up that benefits you best.
  • Front-Mounted Design: Complete repairs or maintenance quickly thanks to a front-mounted design that provides easy access to components.
  • Tested and Certified: All of our valve manifold box assemblies are fully-functioned and leak tested with certification

Choosing the Right Gas Valve Manifold Box

When choosing a valve manifold system, there are a few specifications to consider based on the intended application. These include:

  1. Pressure: consistent pressure control to critical tools and instruments.
  2. Flow: The flow requirement of your gas delivery system determines what size the gas valve manifold needs to be.
  3. Temperature: Based on the application needs, the temperature of gas or other material within the manifold boxes will differ. The material and characteristics of the manifold needs to match the temperature requirements.
  4. Valve Selection: The number of valves, their function, size, and number of ports that are used are determined by the application. In certain cases, the gas valve manifold may need to incorporate pneumatic controls with PLC programming.

Specialty Gas Manifold Custom Options

If our standard 4- or 8-stick valve manifold box assemblies do not meet your application and/or performance requirements, our team can create a custom solution that matches your specifications. Custom gas boxes are configured to accommodate your specific needs for:

  • Gas type
  • Flow rate
  • Delivery Pressure

Additional features and accessories can be added to valve manifold boxes to further improve its performance. These include:

  • Door/window sensors to provide programmable alarm if door or window is opened.
  • Toxic monitors that monitor enclosures continuously for any sign of toxic leak
  • Fire Sensors like optional UV/IR or dual IR sensors
  • Panel Heater for LVP gases
  • Vent with vacuum generator

Contact us to discuss your custom requirements.

Benefits of Valve Manifolds

  • Safe & Dependable Gas Distribution: Safety is the most important thing when you’re working with dangerous gases. We designed out VMBs to offer safety and reliability that you and your employees can count on.
  • Cost-Effectiveness: Because they are designed to minimize downtime, our valve manifold boxes help reduce costs associated with work stoppages.
  • Versatility: Our gas valve boxes can be configured for any application. Our engineers can help you achieve the set-up that benefits you best.
  • Front-Mounted Design: Complete repairs or maintenance quickly thanks to a front-mounted design that provides easy access to components.
  • Tested & Certified: All our valve manifold box assemblies are fully functioned and leak tested with certification.

SilPac Facility

Purity is a top concern for our clients. With that in mind, we manufacture our valve manifold boxes in a Class 100 cleanroom, ensuring that our assemblies are completely free of contamination. With manufacturing facilities in Santa Clara, CA (Silicon Valley) and Austin, TX, we can serve clients all around the world.

Industries We Serve

While a significant percentage of our customers are in the semiconductor industry, we have extensive experience serving a range of industries, including government, aerospace, biopharma, and solar. We also provide gas boxes for universities with large research facilities.

Contact Us Today for Valve Manifold Boxes

We design and manufacture valve manifold boxes (VMB) for both inert and hazardous gas applications. Our valve manifold boxes can help reduce your overall costs and built with compact footprints for an efficient use of space in your facility.

While a significant percentage of our customers are in the semiconductor industry, we have extensive experience serving a range of industries, including government, aerospace, biopharma, and solar. We also provide gas boxes for universities with large research facilities.

Purity is a top concern for our clients. With that in mind, we manufacture our valve manifold boxes in a Class 1000 / 100 cleanrooms, ensuring that our assemblies are completely free of contamination. With manufacturing facilities in Silicon Valley and Austin, Texas, we can serve clients all around the world.

SilPac is your leading resource for everything from valve manifold box assemblies to complete gas delivery systems. We respond to customer inquiries within 24 hours.

Request a quote or contact us today to learn more about our gas valve manifold box assemblies.

Additional Services

Our valve manifold box assemblies include onsite start-up, function testing, and training. Field service and support is available as needed. Performance Management (PM) programs are available for enhanced uptime and performance.

Contact us today for more information on the services we provide.